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75 results

Conference Proceedings

1. FORMATION OF BURIED α- AND β-FeSi2 IN (100) Si BY HIGH DOSE ION IMPLANTATION

Maex, K. ; Lauwers, A. ; Van Hove, M. ; Vandervorst, W. ; Van Rossum, M.

Pub. info.:	Beam-solid interactions : fundamentals and applications : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A.. pp.869-874, 1993. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	279

Conference Proceedings

2. *SELF-ALIGNED SILICIDES FOR ULSI

Maex Karen ; Vandenabeele, P. ; Deweerdt, B. ; Coppye, W. ; Vermeiren, C. ; Lauwers, A. ; Maex, K.

Pub. info.:	Advanced metallization and processing for semiconductor devices and circuits--II : symposium held April 27-May 1, 1992, San Francisco, California, U.S.A.. pp.133-144, 1992. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	260

Conference Proceedings

3. GEOMETRICAL EFFECTS AND DISINTEGRATION OF NARROW TiSi2 /POLY-Si LINES

Norstom, H. ; Maex, K. ; Vandenabeele, P.

Pub. info.:	Advanced metallizations in microelectronics : symposium held April 16-20, 1990, San Francisco, California, U.S.A.. pp.173-178, 1990. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	181

Conference Proceedings

4. APPLICABILITY OF HF SOLUTIONS FOR CONTACT HOLE CLEANING ON TOP OF TiSi2

Baklanov, M. ; Kondoh, E. ; Vanhaelemeersch, S. ; Maex, K.

Pub. info.:	Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.602-609, 1997. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	97-35

Conference Proceedings

5. Buckling Instabilities of Thin Cap Layers Deposited Onto Low-k Dielectric Films

Iacopi, F. ; Brongersma, S.H. ; Abell, T.J. ; Maex, K.

Pub. info.:	Polymer/metal interfaces and defect mediated phenomena in ordered polymers : symposia held December 2-6, 2002, Boston, Massachusetts, U.S.A.. pp.383-780, 2003. Warrendale, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	734

Conference Proceedings

6. Integration of Low and High Temperature Junction Anneals for 45 nm CMOS

Lindsay, R. ; Pawlak, B. ; Henson, K. ; Satta, A. ; Severi, S. ; Lauwers, A. ; Surdeanu, R. ; McCoy, S. ; Gelpey, J. ; Pages, X. ; Maex, K.

Pub. info.:	Advanced short-time thermal processing for Si-based CMOS devices : proceedings of the international symposium. pp.145-156, 2004. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2004-01

Conference Proceedings

7. THE FORMATION AND REMOVAL OF RESIDUE FORMED DURING TiN FLUOROCARBON PLASMA ETCHING

Kim, Y.B. ; Conard, T. ; Vanhaeren, D. ; Baklanov, M. ; Vanhaelemeersch, S. ; Vandervorst, W. ; Maex, K.

Pub. info.:	Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.610-616, 1997. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	97-35

Conference Proceedings

8. 26 Co-silicide, Co(Ni)-silicide and Ni-silicide to source¥drain contact resistance

Akheyar, A. ; Lauwers, A. ; Kitti, J.A. ; De Potter, M ; Chamirian, O. ; Jonckheere, R. ; Leunissen, P. ; van Dal, M ; Lindsay, R. ; Tempel, G. ; Maex, K.

Pub. info.:	Advanced short-time thermal processing for Si-based CMOS devices : proceedings of the international symposium. pp.197-204, 2003. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2003-14

Conference Proceedings

9. Surface Modification of Porous Low-k Dielectrics

Boullart, W. ; Vanhaelemeersch, S. ; Maex, K.

Pub. info.:	Thin film materials, processes, and reliability, plasma processing for the 100 nm node and copper interconnects with low-k inter-level dielectric films : proceedings of the international symposium. pp.206-215, 2003. Pennington, N.J.. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2003-13

10.

Conference Proceedings

10. 47. Electroless Copper Deposition on TiN

Min, W.S. ; Palmans, R. ; Maex, K. ; Lee, D.N.

Pub. info.:	Proceedings of the Symposium on Fundamental Aspects of Electrochemical Deposition and Dissolution Including Modeling. pp.521-526, 1997. Pennington, New Jersey. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	97-27

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Author: Maex, K.