1.

Conference Proceedings
Conference Proceedings
1. Gold damascene interconnect technology for millimeter-wave photonics on silicon
Ishii,H. ; Yagi,S. ; Minotani,T. ; Royter,Y. ; Kudou,K. ; Yano,M. ; Nagatsuma,T. ; Machida,K. ; Kyuragi,H.
Pub. info.: Micromachining and microfabrication process technology VII : 22-24 October 2001, San Francisco, USA.  pp.210-219,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4557
2.

Conference Proceedings
Conference Proceedings
2. Method for testing electrostatic discharge tolerance for fingerprint sensor LSI
Tanade,Y. ; Unno,H. ; Machida,K. ; Sato,N. ; Ishii,H. ; Shigematsu,S. ; Morimura,H. ; Kyuragi,H.
Pub. info.: Reliability, testing, and characterization of MEMS/MOEMS : 22-24 October 2001, San Trancisco, USA.  pp.81-88,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4558
3.

Conference Proceedings
Conference Proceedings
3. Microfabrication technology for high-speed Si-based systems
Ishii,H. ; Yagi,S. ; Saito,K. ; Hirata,A. ; Kudo,K. ; Yano,M. ; Nagatsuma,T. ; Machida,K. ; Kyuragi,H.
Pub. info.: Micromachining and Microfabrication.  pp.43-52,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4230