1.

Conference Proceedings
Conference Proceedings
1. Analysis of Molybdenum Via-Hole Sidewall Residue
Pirila, N. ; Likonen, J. ; Newcomb, S. ; Tapper, U. ; Kattelus, H.
Pub. info.: Interconnect and contact metallization for ULSI : proceedings of the international symposium.  pp.68-80,  1999.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-31
2.

Conference Proceedings
Conference Proceedings
2. CHARACTERIZATION OF W-N ALLOYS FORMED BY SPUTTER DEPOPSITION
Affolter, K ; Kattelus, H. ; Nicolet, N.-A.
Pub. info.: Thin films : the relationship of structure to properties : symposium held April 15-17, 1985, San Francisco, California, U.S.A..  pp.167-174,  1985.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 47
3.

Conference Proceedings
Conference Proceedings
3. Deposition and Etching of 4 um Thick Aluminum Layers for Integrated Inductors
Franssila, S. ; Kattelus, H. ; Pirila, N. ; Riihisaari, T.
Pub. info.: Proceedings of the International Symposium on Thin Film Materials, Processes, Reliability, and Applications, Thin Film Processes.  pp.144-154,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-30
4.

Conference Proceedings
Conference Proceedings
4. Growth of Dielectric Ta2O5/HfO2 Thin Film Nanolaminate Capacitors by Atomic Layer Epitaxy
Kanniainen, T. ; Skarp, J. ; Kattelus, H.
Pub. info.: Proceedings of the Symposium on Interconnect and Contact Metallization.  pp.36-46,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-31
5.

Conference Proceedings
Conference Proceedings
5. PHOTOELASTIC WAVEGUIDES FORMED BY INTERFACIAL REACTIONS ON SEMICONDUCTOR HETEROSTRUCTURES
Yu, L. S. ; Guan, Z. F. ; Deng, F. ; Liu, Q. Z. ; Pappert, S. A. ; Yu, P. K. L. ; Lau, S. S. ; Redwing, J. ; Geisz, J. ; Kuech, T. F. ; Kattelus, H. ; Suni, I.
Pub. info.: Growth, processing, and characterization of semiconductor heterostructures : Symposium held November 29-December 2, 1993, Massachusetts, U.S.A..  pp.251-,  1994.  Pittsburgh.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 326
6.

Conference Proceedings
Conference Proceedings
6. Microstructure and mechanical properties of nitrided molybdenum silicide coatings
Hirvonen, J-P. ; Suni, I. ; Kattelus, H. ; Lappalainen, R. ; Torri, P. ; Kung, H. ; Jervis, T. R. ; Nastasi, M.
Pub. info.: High temperature silicides and refractory alloys : symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A. /editors, C.L. Briant ... [et al.].  pp.279-,  1994.  Pittsburg, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 322
7.

Technical Paper
Technical Paper
7. DIFFUSION BARRIERS IN SEMICONDUCTOR CONTACT METALIZATION.
Kattelus, H.
Pub. info.: NASA Technical Reports(N89).  (VTT-RR-48),  pp.1-125,  1988.  National Aeronautics and Space Administration