1.

Conference Proceedings
Conference Proceedings
1. Measurement of effective source shift using a grating-pinhole mask
Sato,K. ; Tanaka,S. ; Fujisawa,T. ; Inoue,S.
Pub. info.: Optical microlithography XII : 17-19 March 1999, Santa Clara, California.  Part1  pp.99-107,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3679
2.

Conference Proceedings
Conference Proceedings
2. Measurement of transmittance variation of projection lenses depending on the light paths using a grating-pinhole mask
Sato,K. ; Inoue,S.
Pub. info.: Optical Microlithography XIV.  4346  pp.379-386,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4346