1.

Conference Proceedings
Conference Proceedings
1. ECR Etching of Group-III Nitride Binary and Ternary Films
Shul, R.J. ; Howard, A.J. ; Pearton, S.J. ; Abernathy, C.R. ; Variuli, C.B. ; Barnes, P.A.
Pub. info.: Proceedings of the Symposium on Wide Bandgap Semiconductors and Devices and the Twenty-Third State-of-the-Art Program on Compound Semiconductors (SOTAPOCS XXIII).  pp.217-230,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-21
2.

Conference Proceedings
Conference Proceedings
2. Cl2+Ar Reactive-Ion-Beam Etching of InGaAlAs for Smooth, Low-Damage Definition of Asymmetric Fabry-Perot Optical Transmission Modulators
Vawter, G.A. ; Eritz, I.J. ; Drummond, T.J. ; Lee, S.R. ; Hafich, M.J. ; Howard, A.J. ; Briggs, R.D. ; Casalnuovo, S.A. ; Griego, L.
Pub. info.: Proceedings of the Twenty-fourth State-of-the-Art Program on Compound Semiconductors.  pp.221-225,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-2
3.

Conference Proceedings
Conference Proceedings
3. A Versatile Masking Process for Plasma Etched Backside Via Holes in GaAs
Howard, A.J.
Pub. info.: AIchE 1994 Annual Meeting : November 13-18 San Francisco Hilton and Towers Hotel, San Francisco, California.  1994.  New York.  American Institute of Chemical Engineers
Title of ser.: AIChE meeting [papers]
Ser. no.: 1994
4.

Conference Proceedings
Conference Proceedings
4. 29 Using electrochemistry in device processing on poly(tetrafluoroethylene) substrates
Howard, A.J. ; Rye, R.R. ; Rico, A.J. ; Rieger, D.J. ; Lovejoy, M.L. ; Sloan, L.R. ; Mitchell, M.A.
Pub. info.: Proceedings of the Second International Symposium on Electrochemical Microfabrication.  pp.333-340,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-32
5.

Conference Proceedings
Conference Proceedings
5. Complementary GaAs Junction-Gated Heterostructure Field Effect Transistor Fabrication for Integrated Circuits
Baca, A.G. ; Zolper, J.C. ; Sherwin, M.E. ; Robertson, P.J. ; Shul, R.J. ; Howard, A.J. ; Rieger, D.J. ; Klem, J.F.
Pub. info.: Proceedings of the Twenty-first State-of-the-Art Program on Compound Semiconductors (SOTAPOCS XXI).  pp.214-223,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-34
6.

Conference Proceedings
Conference Proceedings
6. High Rate ECR Etching of III-V Nitride Materials
Shul, R.J. ; Howard, A.J. ; Kilcoyne, S.P. ; Pearton, S.J. ; Abernathy, C.R. ; Vartuli, C.B. ; Barnes, P.A. ; Bozack, M.J.
Pub. info.: Proceedings of the Symposium on Nondestructive Wafer Characterization for Compound Semiconductor Materials and the twenty-second State-of-the-Art Program on Compound Semiconductors (SOTAPOCS XXII).  pp.209-225,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-6
7.

Conference Proceedings
Conference Proceedings
7. GaAs Integrated Circuit Process Characterization and Nondestructive Process Monitoring by AFM
Baca, A.G. ; Howard, A.J. ; Shul, R.J. ; Zoiper, J.C. ; Rieger, D.J.
Pub. info.: Proceedings of the Symposium on Nondestructive Wafer Characterization for Compound Semiconductor Materials and the twenty-second State-of-the-Art Program on Compound Semiconductors (SOTAPOCS XXII).  pp.63-70,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-6