1.

Conference Proceedings
Conference Proceedings
1. COMPARISON OF ELECTROMIGRATION RESISTANCE IN MULTILAYER A1-Si/Ti AND A1-Si/Ta INTERCONNECTS
Finetti, M. ; Suni, I. ; DeSanti, G. ; Bacci, L. ; Caprile, C.
Pub. info.: Materials issues in silicon integrated circuit processing : symposium held April 15-18, 1986, Palo Alto, California, U.S.A..  pp.297-302,  1986.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 71
2.

Conference Proceedings
Conference Proceedings
2. EFFECT OF PREAMORPHIZATION DEPTH ON CHANNELING TAILS IN B+ AND As+ IMPLANTED SILICON
Suni, I. ; Ronkainen, H. ; Eranen,S. ; Murto, T. ; Krontiras, Ch. ; Finetti, M.
Pub. info.: Ion beam processes in advanced electronic materials and device technology : symposium held April 15-18, 1985, San Francisco, California, U.S.A..  pp.39-44,  1985.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 45
3.

Conference Proceedings
Conference Proceedings
3. ELECTROMIGRATION RESISTANCE OF MULTILAYER ALUMINUM/ TITANIUM INTERCONNECTS
Finetti, M. ; Ronkainen, H. ; Blomberg, M. ; Suni, I.
Pub. info.: Thin films : interfaces and phenomena : symposium held December 2-6, 1985, Boston, Massachusetts, USA.  pp.811-816,  1985.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 54
4.

Conference Proceedings
Conference Proceedings
4. ION IRRADIATION EFFECTS ON PT CONTACTS TO Si WITH AND WITHOUT INTERFACIAL CHEMICAL OXIDE
Banwell, T. ; Finetti, M. ; Sani, I. ; Nicolet, M.-A. ; Sau, S. S. ; Scott, D. M.
Pub. info.: Defects in semiconductors II : symposium held November 1982 in Boston, Massachusetts, U.S.A..  pp.411-416,  1983.  New York.  North-Holland
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 14
5.

Conference Proceedings
Conference Proceedings
5. ELECTRICAL CHARACTERIZATION OF ION IMPLANTED, THERMALLY ANNEALED TiN FILMS ACTING AS DIFFUSION BARRIERS ON SHALLOW JUNCTION SILICON DEVICES
Armigliato, A. ; Finetti, M. ; Gabilli, E ; Guerri, S. ; Ostoja, P. ; Sabato, G. ; Scorzoni, A.
Pub. info.: Ion beam processes in advanced electronic materials and device technology : symposium held April 15-18, 1985, San Francisco, California, U.S.A..  pp.183-188,  1985.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 45
6.

Conference Proceedings
Conference Proceedings
6. Characterization of Al-Si ohmic contacts obtained on shallow junctions by laser and electron beam annealing
Armigliato, A. ; De Luca, P. ; Finetti, M. ; Solmi, S.
Pub. info.: Laser and electron-beam solid interactions and materials processing : proceedings of the Materials Research Society Annual Meeting, November 1980, Copley Plaza Hotel, Boston, Massachusetts, U.S.A..  pp.329-336,  1981.  New York.  North Holland
Title of ser.: Materials Research Society symposia proceedings
Ser. no.: 1