1.

Conference Proceedings
Conference Proceedings
1. Operation of spatial light modulators in DUV light
Dauderstaedt, U. ; Duerr, P. ; Krellmann, M. ; Karlin, T. ; Berzinsh, U. ; Leonardsson, L. ; Wendrock, H.
Pub. info.: MOEMS and Miniaturized Systems III.  pp.277-284,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4983
2.

Conference Proceedings
Conference Proceedings
2. Characterization of spatial light modulators for microlithography
Duerr, P. ; Dauderstaedt, U. ; Kunze, D. ; Auvert, M. ; Bakke, T. ; Schenk, H. ; Lakner, H.K.
Pub. info.: MOEMS and Miniaturized Systems III.  pp.266-276,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4983
3.

Conference Proceedings
Conference Proceedings
3. Operation of spatial light modulators in DUV light
Dauderstaedt, U. ; Duerr, P. ; Krellmann, M. ; Karlin, T. ; Berzinsh, U. ; Leonardsson, L. ; Wendrock, H.
Pub. info.: MOEMS Display and Imaging Systems.  pp.222-229,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4985
4.

Conference Proceedings
Conference Proceedings
4. Characterization of spatial light modulators for microlithography
Duerr, P. ; Dauderstaedt, U. ; Kunze, D. ; Auvert, M. ; Bakke, T. ; Schenk, H. ; Lakner, H.K.
Pub. info.: MOEMS Display and Imaging Systems.  pp.211-221,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4985