1.

Conference Proceedings
Conference Proceedings
1. Adhesion of Polysilicon Microbeams in Controlled Humidity Ambients
Boer, M. P. de ; Clews, P. J. ; Smith, B. K. ; Michalske, T. A.
Pub. info.: Microelectromechanical structures for materials research : symposium held April 15-16, 1998 , San Francisco, California, U.S.A..  pp.131-,  1998.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 518
2.

Conference Proceedings
Conference Proceedings
2. Friction measurement in MEMS using a new test structure
Crozier, B. T. ; Boer, M. P. de ; Redmond, J. M. ; Bahr, D. F. ; Michalske, T. A.
Pub. info.: Materials science of microelectromechanical systems (MEMS) devices II : symposium held November 29-December 1, 1999, Boston, Massachusetts, U.S.A..  pp.129-,  2000.  Warrendale, Pa..  MRS-Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 605