1.

Conference Proceedings
Conference Proceedings
1. The random contact hole solutions for future technology nodes
A. Chen ; S. Hansen ; M. Moers ; J. Shieh ; A. Engelen ; K. van I. Schenau ; S. Tseng
Pub. info.: Optical microlithography XX.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6520
2.

Conference Proceedings
Conference Proceedings
2. Masks for flash memory gates for the 45nm node: binary or attenuated?
E. van Setten ; A. Engelen ; J. Finders ; M. Dusa
Pub. info.: EMLC 2007 : 23rd european mask and lithography conference : 22-25 January 2007, Grenoble, France.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6533
3.

Conference Proceedings
Conference Proceedings
3. Imaging performance optimization for hyper-NA scanner systems in high volume production
M. van de Kerkhof ; E. van Setten ; A. Engelen ; V. Plachecki ; H. Liu
Pub. info.: Optical Microlithography XXI.  2  pp.69241W-1-69241W-13,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6924
4.

Conference Proceedings
Conference Proceedings
4. The contact hole solutions for future logic technology nodes
A. Chen ; S. Hansen ; M. Moers ; J. Shieh ; A. Engelen
Pub. info.: Quantum optics, optical data storage, and advanced microlithography : 12-14 November 2007, Beijing, China.  pp.68271O-1-68271O-12,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6827