Cheng, X. ; Xu, D. ; Chen, J. ; Cai, B. ; Ding, G.
Pub. info.:
Micromachining and Microfabrication Process Technology and Devices. pp.147-152, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Chen, J. ; Cai, B. ; Wang, L. ; Xu, D. ; Cheng, X.
Pub. info.:
Micromachining and Microfabrication Process Technology and Devices. pp.298-305, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Cheng, X. ; Xu, D. ; Cai, B. ; Wang, L. ; Chen, J. ; Li, G. ; Xu, S.
Pub. info.:
Micromachining and Microfabrication Process Technology and Devices. pp.340-345, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering