1.

Conference Proceedings
Conference Proceedings
1. Development of an experimental EUV interferometer for benchmarking several EUV wavefront metrology schemes
Murakami, K. ; Saito, J. ; Ota, K. ; Kondo, H. ; Ishii, M. ; Kawakami, J. ; Oshino, T. ; Sugisaki, K. ; Zhu, Y. ; Hasegawa, M. ; Sekine, Y. ; Takeuchi, S. ; Ouchi, C. ; Kakuchi, O. ; Watanabe, Y. ; Hasegawa, T. ; Hara, S. ; Suzuki, A.
Pub. info.: Emerging Lithographic Technologies VII.  1  pp.257-264,  2003.  Bellingham, WA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5037
2.

Conference Proceedings
Conference Proceedings
2. Lateral shearing interferometer for EUVL: theoretical analysis and experiment
Zhu, Y. ; Sugisaki, K. ; Ouchi, C. ; Hasegawa, M. ; Niibe, M. ; Suzuki, A. ; Murakami, K.
Pub. info.: Emerging Lithographic Technologies VIII.  pp.824-832,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5374