1.

Conference Proceedings
Conference Proceedings
1. Development of EUV point diffraction interferometry using the NewSUBARU undulator radiation
Niibe, M. ; Mukai, M. ; Tanaka, T. ; Sugisaki, K. ; Zhu, Y. ; Gomei, Y.
Pub. info.: X-ray mirrors, crystals, and multilayers II : 10-11 July 2002, Seattle, Washington, USA.  pp.204-211,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4782
2.

Conference Proceedings
Conference Proceedings
2. Comparisons between EUV at-wavelength metrological methods [5921-15]
Sugisaki, K. ; Okada, M. ; Zhu, Y. ; Otaki, K. ; Liu, Z. ; Kawakami, J. ; Ishii, M. ; Saito, J. ; Murakami, K. ; Hasegawa, M. ; Ouchi, C. ; Kato, S. ; Hasegawa, T. ; Suzuki, K. ; Yokota, H. ; Niibe, M. ; Takeda, M.
Pub. info.: Advances in metrology for x-ray and EUV optics : 2-3 August 2005, San Diego, California, USA.  pp.59210D-,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5921
3.

Conference Proceedings
Conference Proceedings
3. Development of an experimental EUV interferometer for benchmarking several EUV wavefront metrology schemes
Murakami, K. ; Saito, J. ; Ota, K. ; Kondo, H. ; Ishii, M. ; Kawakami, J. ; Oshino, T. ; Sugisaki, K. ; Zhu, Y. ; Hasegawa, M. ; Sekine, Y. ; Takeuchi, S. ; Ouchi, C. ; Kakuchi, O. ; Watanabe, Y. ; Hasegawa, T. ; Hara, S. ; Suzuki, A.
Pub. info.: Emerging Lithographic Technologies VII.  1  pp.257-264,  2003.  Bellingham, WA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5037
4.

Conference Proceedings
Conference Proceedings
4. ASET development of at-wavelength phase-shifting point diffraction interferometer
Sugisaki, K. ; Zhu, Y. ; Gomei, Y. ; Niibe, M.
Pub. info.: Emerging Lithographic Technologies VI.  Part Two  pp.695-701,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4688
5.

Conference Proceedings
Conference Proceedings
5. Lateral shearing interferometer for EUVL: theoretical analysis and experiment
Zhu, Y. ; Sugisaki, K. ; Ouchi, C. ; Hasegawa, M. ; Niibe, M. ; Suzuki, A. ; Murakami, K.
Pub. info.: Emerging Lithographic Technologies VIII.  pp.824-832,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5374