1.

Conference Proceedings
Conference Proceedings
1. Optical properties study of silicon oxynitride films deposited by RF magnetron sputtering
Zhu, Y. ; Gu, P. ; Ye, H. ; Shen, W.
Pub. info.: MEMS/MOEMS Technologies and Applications II.  pp.124-129,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5641
2.

Conference Proceedings
Conference Proceedings
2. The effects of oxygen partial pressure and substrate temperature on the structural and optical properties of ZnO films
Zou, T. ; Ye, H. ; Shen, W. ; Shen, Z. ; Zhu, Y.
Pub. info.: Optoelectronic Devices and Integration.  pp.326-334,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5644