1.

Conference Proceedings
Conference Proceedings
1. Development of EUV point diffraction interferometry using the NewSUBARU undulator radiation
Niibe, M. ; Mukai, M. ; Tanaka, T. ; Sugisaki, K. ; Zhu, Y. ; Gomei, Y.
Pub. info.: X-ray mirrors, crystals, and multilayers II : 10-11 July 2002, Seattle, Washington, USA.  pp.204-211,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4782
2.

Conference Proceedings
Conference Proceedings
2. ASET development of at-wavelength phase-shifting point diffraction interferometer
Sugisaki, K. ; Zhu, Y. ; Gomei, Y. ; Niibe, M.
Pub. info.: Emerging Lithographic Technologies VI.  Part Two  pp.695-701,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4688