1.

Conference Proceedings
Conference Proceedings
1. ILSim: a compact simulation tool for interferometric lithography
Fan, Y. ; Bourov, A. ; Zavyalova, L. ; Zhou, J. ; Estroff, A. ; Lafferty, N. ; Smith, B. W.
Pub. info.: Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA.  pp.1805-1817,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5754
2.

Conference Proceedings
Conference Proceedings
2. Synthetic defocus in interferometric lithography
Cropanese, F. C. ; Bourov, A. ; Fan, Y. ; Zhou, J. ; Zavyalova, L. ; Smith, B. W.
Pub. info.: Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA.  pp.1769-1779,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5754