1.

Conference Proceedings

Conference Proceedings
Cui, Z. ; Zhao, Z. ; Xia, S.
Pub. info.: Design, test, integration, and packaging of MEMS/MOEMS 2002 : 6-8 May, 2002, Cannes, France.  pp.71-76,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4755
2.

Conference Proceedings

Conference Proceedings
Zhao, Z. ; Cui, D.F. ; Xia, S.H. ; Cui, Z.
Pub. info.: Nano- and Microtechnology: Materials, Processes, Packaging, and Systems.  pp.321-326,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4936