1.

Conference Proceedings
Conference Proceedings
1. Fast sparse aerial-image calculation for OPC
Cobb,N.B. ; Zakhor,A.
Pub. info.: 15th Annual BACUS Symposium on Photomask Technology and Management.  pp.534-545,  1995.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2621
2.

Conference Proceedings
Conference Proceedings
2. Experimental results on optical proximity correction with variable-threshold resist model
Cobb,N.B. ; Zakhor,A. ; Reihani,M. ; Jahansooz,F. ; Raghavan,V.N.
Pub. info.: Optical Microlithography X.  pp.458-468,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3051
3.

Conference Proceedings
Conference Proceedings
3. Mathematical and CAD framework for proximity correction
Cobb,N.B. ; Zakhor,A. ; Miloslavsky,E.
Pub. info.: Optical Microlithography IX.  Part1  pp.208-222,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2726