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Optical design and testing II : 8-12 November 2004, Beijing, China. pp.783-790, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Optical design and testing II : 8-12 November 2004, Beijing, China. pp.772-776, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
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Photomask and Next-Generation Lithography Mask Technology XII. pp.74-82, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
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Optical Microlithography XIX. pp.61540M-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
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