1.
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Conference Proceedings
|
Thirumala, V. ; Cao, H.B. ; Yueh, W. ; Choi, H. ; Golovkina, V. ; Wallace, J. ; Nealey, P.F. ; Thielman, D. ; Cerrina, F.
Pub. info.: |
Advances in Resist Technology and Processing XXI. pp.765-772, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
5376 |
|
2.
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Conference Proceedings
|
Cao, H.B. ; Yueh, W. ; Rice, B.J. ; Roberts, J. ; Bacuita, T. ; Chandhok, M.
Pub. info.: |
Advances in Resist Technology and Processing XXI. pp.757-764, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
5376 |
|
3.
|
Conference Proceedings
|
Yueh, W. ; Cao, H.B. ; Chandhok, M. ; Lee, S. ; Shumway, M. ; Bokor, J.
Pub. info.: |
Advances in Resist Technology and Processing XXI. pp.434-442, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
5376 |
|