Lucas, K.D. ; Yuan, C.-M. ; Boone, R. ; Strozewski, K. ; Porter, J. ; Tian, R. ; Wimmer, K. ; Cobb, J. ; Wilkinson, B. ; Toublan, O.
Pub. info.:
Design and process integration for microelectronic manufacturing II [sic] : 26-27 February 2004, Santa Clara, California, USA. pp.158-169, 2004. Bellingham, Wash., USA. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering