1.

Conference Proceedings
Conference Proceedings
1. Combining OPC and design for printability into 65-nm logic designs
Lucas, K.D. ; Yuan, C.-M. ; Boone, R. ; Strozewski, K. ; Porter, J. ; Tian, R. ; Wimmer, K. ; Cobb, J. ; Wilkinson, B. ; Toublan, O.
Pub. info.: Design and process integration for microelectronic manufacturing II [sic] : 26-27 February 2004, Santa Clara, California, USA.  pp.158-169,  2004.  Bellingham, Wash., USA.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5379
2.

Conference Proceedings
Conference Proceedings
2. Cost of ownership reduction for OPC development and production
Yuan, C.-M. ; Jarvis, B. ; Lucas, K.D. ; Boone, R. ; Tian, R. ; Reich, A.
Pub. info.: Optical Microlithography XVII.  pp.1121-1129,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5377