1.

Conference Proceedings
Conference Proceedings
1. FINE METAL PARTICLE FORMATION FROM ORGANOMETALLIC COMPOUNDS BY LASER IGNITED MILD EXPLOSIVE REACTION
Shimo, N. ; Yoshihara, K.
Pub. info.: Laser and particle-beam chemical processes on surfaces : symposium held November 29-December 2, 1988, Boston, Massachusetts, U.S.A..  pp.99-106,  1989.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 129
2.

Conference Proceedings
Conference Proceedings
2. Electron Transfer between Adsorbed Dye Molecules and Organic Crystals: Model Character of the Adsorption System for Certain Aspects in Photosynthesis
Kemnitz, K. ; Nakashima, N. ; Yoshihara, K.
Pub. info.: Photochemistry on solid surfaces.  pp.236-,  1989.  Amsterdam.  Elsevier
Title of ser.: Studies in surface science and catalysis
Ser. no.: 47
3.

Conference Proceedings
Conference Proceedings
3. The Place of Science in Economic Development: the Implications of East Asian Experience to Eastern Europe
Yoshihara, K.
Pub. info.: Science and technology management.  pp.170-176,  1998.  Amsterdam.  IOS Press
Title of ser.: NATO ASI series. Partnership sub-series 4, Science and technology policy
Ser. no.: 22
4.

Conference Proceedings
Conference Proceedings
4. Airborne contamination control for 157-nm lithography: influence of ammonia contamination
Matsui, H. ; Kitano, J. ; Yoshihara, K. ; Kawaguchi, E. ; Furukawa, T. ; Matsunaga, K. ; Itani, T. ; Fujii, K.
Pub. info.: Advances in Resist Technology and Processing XXI.  pp.1074-1081,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5376
5.

Conference Proceedings
Conference Proceedings
5. Critical dimension control in 90nm - 65nm node
Terashita, Y. ; Shizukuishi, M. ; Shite, H. ; Kyoda, H. ; Oshima, K. ; Yoshihara, K.
Pub. info.: Advances in Resist Technology and Processing XXI.  pp.1264-1273,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5376
6.

Conference Proceedings
Conference Proceedings
6. Improvement of CD controllability in developer process
Kyoda, H. ; Okouchi, A. ; Takeguchi, H. ; Kim, H.W. ; Yamamoto, T. ; Yoshihara, K.
Pub. info.: Advances in Resist Technology and Processing XX.  2  pp.1353-1365,  2003.  Bellingham, CA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5039
7.

Conference Proceedings
Conference Proceedings
7. Critical dimension (CD) control in 157-nm lithography
Hori, S. ; Yoshihara, K. ; Kyoda, H. ; Matsui, H. ; Furukawa, T. ; Miyoshi, S. ; Kawaguchi, E. ; Itani, T.
Pub. info.: Advances in Resist Technology and Processing XX.  2  pp.1333-1342,  2003.  Bellingham, CA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5039
8.

Conference Proceedings
Conference Proceedings
8. Behavior and control of resist dissolution in the development process
Takai, Y. ; Mulhall, J. ; Yoshihara, K. ; Kyoda, H. ; Takeguchi, H.
Pub. info.: Advances in Resist Technology and Processing XIX.  Part Two  pp.929-935,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4690