1.

Conference Proceedings
Conference Proceedings
1. Study of pupil filters for depth of focus enhancement in printing contact holes
Wang,C.-M. ; Yu,S.-S. ; Yen,A.
Pub. info.: Optical microlithography XII : 17-19 March 1999, Santa Clara, California.  Part2  pp.783-791,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3679
2.

Conference Proceedings
Conference Proceedings
2. Trench pattern lithography for 0.13- and 0.10-μm logic devices at 248- and 193-nm wavelengths
Wang,Y.-Y. ; Lin,H.-T. ; Yu,S.-S. ; Chen,C.-K. ; Ku,Y.-C. ; Yen,A. ; Lin,B.J.
Pub. info.: Optical Microlithography XIV.  4346  pp.276-292,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4346