1.

Conference Proceedings
Conference Proceedings
1. Process development and fabrication of application-specific microvalves
Xu,B. ; Castracane,J. ; Geer,R.E. ; Yao,Y. ; Altemus,B.
Pub. info.: Micromachining and microfabrication process technology VI : 18-20 September 2000, Santa Clara, USA.  pp.299-306,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4174
2.

Conference Proceedings
Conference Proceedings
2. Fabrication of the refined MEMS-based compound grating (MCG) based on silicon micromachining
Yao,Y. ; Xu,B. ; Castracane,J.
Pub. info.: Micromachining and microfabrication process technology VII : 22-24 October 2001, San Francisco, USA.  pp.31-39,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4557
3.

Conference Proceedings
Conference Proceedings
3. Component development and integration issues for MOEMS
Castracane,J. ; Xu,B. ; Yao,Y. ; Baks,C. ; Lavrijsen,R.
Pub. info.: MOEMS and Miniaturized systems II : 22-24 October 2001, San Francisco, USA.  pp.201-208,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4561
4.

Conference Proceedings
Conference Proceedings
4. Component development and integration issues for bio/chemometric appliations of VCSEL and MOEMS arrays
Castracane,J. ; Baks,C. ; Oktyabrsky,S. ; Xu,B. ; Yao,Y.
Pub. info.: Functional integration of opto-electro-mechanical devices and systems : 24-25 January 2001, San Jose, USA.  pp.132-138,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4284