1.

Conference Proceedings
Conference Proceedings
1. Mechanical analysis and experiment study of aet>lm paraboloidal mirror [6148-20]
Guo, Y. ; Yang, S. ; Gu, X. ; Wang, S.
Pub. info.: 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies : Large mirrors and telescopes :2-5 November 2005, Xian, China.  pp.61480K-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6148
2.

Conference Proceedings
Conference Proceedings
2. Reduce process bias of photomask manufacturing for next-generation lithography
Lee, D. P. ; Wang, S. ; Tian, T. ; Yang, S. ; Chen, R.
Pub. info.: 24th Annual BACUS Symposium on Photomask Technology.  pp.1152-1160,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5567