1.

Conference Proceedings
Conference Proceedings
1. DEPENDENCE OF PROFILES OF ARSENIC IMPLANTED INTO SILICON ON TILT AND ROTATION ANGLES
Yang, S. ; Park, C. ; Klein, K. ; Gupta, P. ; Tasch, A. ; Simonton, R. ; Lux, G. ; McGee, C.
Pub. info.: Phase formation and modification by beam-solid interactions : symposium held December 2-6, 1991, Boston, Massachusetts, U.S.A..  pp.197-202,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 235
2.

Conference Proceedings
Conference Proceedings
2. A NEW COMPUTATIONALLY-EFFICIENT TWO-DIMENSIONAL MODEL FOR BORON IMPLANTATION INTO SINGLE-CRYSTAL SILICON
Klein, K. M. ; Park, C. ; Yang, S. ; Morris, S. ; Do, V. ; Tasch, A. F.
Pub. info.: Phase formation and modification by beam-solid interactions : symposium held December 2-6, 1991, Boston, Massachusetts, U.S.A..  pp.217-222,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 235