1.

Conference Proceedings
Conference Proceedings
1. Compatibilization of PC-SAN Blends by Ultrasound-assisted Melt Mixing
Kim, H. ; Ryu, J. ; Yang, H. ; Lee, J.
Pub. info.: ANTEC 2003, annual technical conference, May 4-8, Nashville, Tennessee.  pp.2333-2339,  2003.  Brookfield Center, Conn..  Society of Plastics Engineers
Title of ser.: Annual Technical Conference - ANTEC : Society of Plastics Engineers Annual Technical Papers
Ser. no.: 61
2.

Conference Proceedings
Conference Proceedings
2. Copper Dry Etching Using and Inductively Coupled O2 Plasma and Hexafluoroacytylacetone
Lee, W. ; Yang, H. ; Lee, J.
Pub. info.: Copper Interconnects, New Contact Metallurgies/Structures, and Low-K Interlevel Dielectrics : proceedings of the International Symposium.  pp.63-68,  2000.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2000-27
3.

Conference Proceedings
Conference Proceedings
3. High NA polarized light lithography for O.29kl process [6154-15]
Park, C. ; Lee, J. ; Yang, K. ; Tseng, S. ; Min, Y.-H ; Yang, H. ; Yim, D. ; Kim, J.
Pub. info.: Optical Microlithography XIX.  pp.61540F-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6154
4.

Conference Proceedings
Conference Proceedings
4. Characterizing optical proximity effect difference among exposure tools [6152-103]
Hong, J. ; Lee, J. ; Kang, E. ; Yang, H. ; Yim, D. ; Kim, J.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XX.  pp.61522N-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6152