1.

Conference Proceedings
Conference Proceedings
1. Toppan's work on phase-shift mask for 64MDRAM
Y. Yamada ; K. Chiba ; E. Karikawa ; K. Kinemura ; M. Otaki
Pub. info.: 14th annual Symposium on Photomask Technology and Management : proceedings : 14-16 September 1994, Santa Clara, California.  pp.274-287,  1994.  Bellingham, WA.  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2322
2.

Conference Proceedings
Conference Proceedings
2. Quality control of embedded-type phase-shift mask
Y. Yamada ; K. Chiba ; E. Karikawa ; H. Unno ; Y. Kikuchi
Pub. info.: Photomask and X-ray mask technology II : 20-21 April 1995, Kawasaki City, Kanagawa, Japan.  pp.356-357,  1995.  Bellingham, WA.  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2512