1.

Conference Proceedings
Conference Proceedings
1. Optimizing integrated optical CD monitoring by floating pre-process variations in a complex multi-layer structure
M. Strobl ; L. Huang ; A. Li ; Y. Luo ; Y. Wen
Pub. info.: Lithography Asia 2008.  1  pp.71400G-1-71400G-12,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 7140
2.

Conference Proceedings
Conference Proceedings
2. Development of bock-end-of-the-line applications using optical digital profilometry (ODP)
J.-J. Huang ; J. H. Yeh ; Y. Luo ; L. Wu ; Y. Wen
Pub. info.: Metrology, inspection, and process control for microlithography XXII.  2  pp.69223K-1-69223K-9,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6922