1.

Conference Proceedings
Conference Proceedings
1. Damage-Free Planarization of 4H-SiC (0001) by Catalyst-Referred Etching
H. Hara ; Y. Sano ; H. Mimura ; K. Arima ; A. Kubota ; K. Yagi ; J. Murata ; K. Yamauchi
Pub. info.: Silicon carbide and related materials 2006 : ECSCRM 2006, Proceedings of the 6th European Conference on Silicon Carbide and Related Materials, Newcastle upon Tyne, UK, September 2006.  pp.749-752,  2007.  Stafa-Zuerich.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 556-557
2.

Conference Proceedings
Conference Proceedings
2. Polishing Characteristics of 4H-SiC Si-Face and C-Face by Plasma Chemical Vaporization Machining
Y. Sano ; M. Watanabe ; K. Yamamura ; K. Yamauchi ; T. Ishida ; K. Arima ; A. Kubota ; Y. Mori
Pub. info.: Silicon carbide and related materials 2006 : ECSCRM 2006, Proceedings of the 6th European Conference on Silicon Carbide and Related Materials, Newcastle upon Tyne, UK, September 2006.  pp.757-762,  2007.  Stafa-Zuerich.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 556-557
3.

Conference Proceedings
Conference Proceedings
3. Laser Peening without Coating to Mitigate Stress Corrosion Cracking and Fatigue Failure of Welded Components
Y. Sano ; Y. Sakino ; N. Mukai ; M. Obata ; I. Chida
Pub. info.: Advanced welding and micro joining/packaging for the 21st century : selected peer reviewed papers from the International Welding/Joining Conference, Korea 2007 (IWJC, Korea 2007), which was held from 10th-12th May 2007 at COEX, Seoul, Korea.  pp.519-522,  2008.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 580-582
4.

Conference Proceedings
Conference Proceedings
4. Planarization of 6-Inch 4H-SiC Wafer Using Catalyst-Referred Etching
A. Isohashi ; Y. Sano ; T. Kato ; K. Yamauchi
Pub. info.: Silicon Carbide and Related Materials 2014 : Selected peer reviewed papers from the European Conference on Silicon Carbide & Related Materials (ECSCRM 2014), September 21-25, 2014, Grenoble, France.  pp.537-540,  2015.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 821-823
5.

Conference Proceedings
Conference Proceedings
5. Cutting of SiC Wafer by Atmospheric-Pressure Plasma Etching with Wire Electrode
Y. Sano ; K. Aida ; T. Kato ; K. Yamamura ; H. Mimura
Pub. info.: Silicon carbide and related materials 2011 : selected, peer reviewed papers from the 14th International Conference on Silicon Carbide and Related Materials 2011 (ICSCRM 2011), September 11-16, 2011, Cleveland, Ohio, USA.  pp.865-868,  2012.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 717-720
6.

Conference Proceedings
Conference Proceedings
6. Abrasive-Free Planarization of 3-Inch 4H-SiC Substrate Using Catalyst-Referred Etching
T. Okamoto ; Y. Sano ; K. Tachibana ; K. Arima ; A.N. Hattori
Pub. info.: Silicon Carbide and Related Materials 2010 : Selected, peer reviewed papers from the 8th European Conference on Silicon Carbide and Related Materials (ECSCRM 2010), held in Oslo (Sundvolden Conference Centre), Norway, August 29th - September 2nd.  pp.493-495,  2011.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 679-680
7.

Conference Proceedings
Conference Proceedings
7. TEM Observation of 8 Deg Off-Axis 4H-SiC (0001) Surfaces Planarized by Catalyst-Referred Etching
S. Sadakuni ; N.X. Dai ; Y. Sano ; K. Arima ; K. Yagi
Pub. info.: Silicon Carbide and Related Materials 2010 : Selected, peer reviewed papers from the 8th European Conference on Silicon Carbide and Related Materials (ECSCRM 2010), held in Oslo (Sundvolden Conference Centre), Norway, August 29th - September 2nd.  pp.489-492,  2011.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 679-680
8.

Conference Proceedings
Conference Proceedings
8. Temperature Dependence of Plasma Chemical Vaporization Machining of Silicon and Silicon Carbide
Y. Sano ; M. Watanabe ; T. Kato ; K. Yamamura ; H. Mimura
Pub. info.: Silicon carbide and related materials 2007 : selected peer reviewed papers from the International Conference on Silicon Carbide and Related Materials 2007, Otsu Prince Hotel Covention Hall, Lake Biwa Resort, Otsu, Japan, October 14-19, 2007.  pp.847-850,  2009.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 600-603
9.

Conference Proceedings
Conference Proceedings
9. Beveling of Silicon Carbide Wafer by Plasma Chemical Vaporization Machining
T. Kato ; Y. Sano ; H. Hara ; H. Mimura ; K. Yamamura
Pub. info.: Silicon carbide and related materials 2007 : selected peer reviewed papers from the International Conference on Silicon Carbide and Related Materials 2007, Otsu Prince Hotel Covention Hall, Lake Biwa Resort, Otsu, Japan, October 14-19, 2007.  pp.843-846,  2009.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 600-603
10.

Conference Proceedings
Conference Proceedings
10. Damage-Free Planarization of 2-Inch 4H-SiC Wafer Using Pt Catalyst Plate and HF Solution
T. Okamoto ; Y. Sano ; H. Hara ; K. Arima ; K. Yagi
Pub. info.: Silicon carbide and related materials 2007 : selected peer reviewed papers from the International Conference on Silicon Carbide and Related Materials 2007, Otsu Prince Hotel Covention Hall, Lake Biwa Resort, Otsu, Japan, October 14-19, 2007.  pp.835-838,  2009.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 600-603
11.

Conference Proceedings
Conference Proceedings
11. New Chemical Planarization of SiC and GaN Using an Fe Plate in H2O2 Solution
J. Murata ; A. Kubota ; K. Yagi ; Y. Sano ; H. Hara
Pub. info.: Silicon carbide and related materials 2007 : selected peer reviewed papers from the International Conference on Silicon Carbide and Related Materials 2007, Otsu Prince Hotel Covention Hall, Lake Biwa Resort, Otsu, Japan, October 14-19, 2007.  pp.815-818,  2009.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 600-603
12.

Conference Proceedings
Conference Proceedings
12. Thinning of 2-Inch SiC Wafer by Plasma Chemical Vaporization Machining Using Cylindrical Rotary Electrode
Y. Sano ; T. Kato ; K. Aida ; K. Yamamura ; H. Mimura
Pub. info.: Silicon Carbide and Related Materials 2010 : Selected, peer reviewed papers from the 8th European Conference on Silicon Carbide and Related Materials (ECSCRM 2010), held in Oslo (Sundvolden Conference Centre), Norway, August 29th - September 2nd.  pp.481-484,  2011.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 679-680
13.

Conference Proceedings
Conference Proceedings
13. AlGaN/GaN HEMTs with Recessed Ohmic Electrodes on Si Substrates
K. Kaifu ; J. Mita ; M. Ito ; Y. Sano ; H. Ishikawa ; T. Egawa
Pub. info.: State-of-the-Art Program on Compound Semiconductors (SOTAPOCS XLIII) and Nitride and Wide Bandgap Semiconductors for Sensors, Photonics, and Electronics VI.  pp.259-265,  2006.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 1(2)
14.

Conference Proceedings
Conference Proceedings
14. Planarization of the Gallium Nitride Substrate Grown by the Na Flux Method Applying Catalyst-Referred Etching
W. Yamaguchi ; S. Sadakuni ; A. Isohashi ; H. Asano ; Y. Sano
Pub. info.: Silicon carbide and related materials 2013 : selected, peer reviewed papers from the 15th International Conference on Silicon Carbide and Related Materials (ICSCRM 2013), September 29 - October 4, 2013, Miyazaki, Japan.  pp.1193-1196,  2014.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 778-780
15.

Conference Proceedings
Conference Proceedings
15. Development and Application of Laser Peening System to Prevent Stress Corrosion Cracking of Reactor Core Shroud
Y. Sano ; M. Kimura ; K. Sato ; M. Obata ; A. Sudo ; Y. Hamamoto ; S. Shima ; Y. Ichikawa ; H. Yamazaki ; M. Naruse ; S. Hida ; I. Watanabe ; Y. Ohno
Pub. info.: Plant Operations and maintenance, major component reliability and materials issues : presented at 8th International Conference on Nuclear Engineering, Baltimore, Maryland, April 2-6, 2000.  1  pp.191-200,  2000.  New York.  American Society of Mechanical Engineers
Title of ser.: ASME Symposia Volumes
Ser. no.: ICONE 8(1)
16.

Conference Proceedings
Conference Proceedings
16. Reduction of Surface Roughness of 4H-SiC by Catalyst-Referred Etching
T. Okamoto ; Y. Sano ; H. Hara ; T. Hatayama ; K. Arima
Pub. info.: Silicon carbide and related materials 2009 : selected peer reviewed papers from the International Conference on Silicon Carbide and Related Materials 2009, Nurnberg, Germany, October 11-16, 2009.  pp.775-778,  2010.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 645-648
17.

Conference Proceedings
Conference Proceedings
17. Influence of the UV Light Intensity on the Photoelectrochemical Planarization Technique for Gallium Nitride
S. Sadakuni ; J. Murata ; K. Yagi ; Y. Sano ; K. Arima
Pub. info.: Silicon carbide and related materials 2009 : selected peer reviewed papers from the International Conference on Silicon Carbide and Related Materials 2009, Nurnberg, Germany, October 11-16, 2009.  pp.795-798,  2010.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 645-648
18.

Conference Proceedings
Conference Proceedings
18. 4H-SiC Planarization Using Catalyst-Referred Etching with Pure Water
A. Isohashi ; Y. Sano ; S. Sadakuni ; K. Yamauchi
Pub. info.: Silicon carbide and related materials 2013 : selected, peer reviewed papers from the 15th International Conference on Silicon Carbide and Related Materials (ICSCRM 2013), September 29 - October 4, 2013, Miyazaki, Japan.  pp.722-725,  2014.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 778-780
19.

Conference Proceedings
Conference Proceedings
19. Dicing of SiC Wafer by Atmospheric-Pressure Plasma Etching Process with Slit Mask for Plasma Confinement
Y. Sano ; H. Nishikawa ; Y. Okada ; K. Yamamura ; S. Matsuyama
Pub. info.: Silicon carbide and related materials 2013 : selected, peer reviewed papers from the 15th International Conference on Silicon Carbide and Related Materials (ICSCRM 2013), September 29 - October 4, 2013, Miyazaki, Japan.  pp.759-762,  2014.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 778-780
20.

Conference Proceedings
Conference Proceedings
20. Thinning of a Two-Inch Silicon Carbide Wafer by Plasma Chemical Vaporization Machining Using a Slit Electrode
Y. Okada ; H. Nishikawa ; Y. Sano ; K. Yamamura ; K. Yamauchi
Pub. info.: Silicon carbide and related materials 2013 : selected, peer reviewed papers from the 15th International Conference on Silicon Carbide and Related Materials (ICSCRM 2013), September 29 - October 4, 2013, Miyazaki, Japan.  pp.750-753,  2014.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 778-780
21.

Conference Proceedings
Conference Proceedings
21. Investigation of the Barrier Heights for Dissociative Adsorption of HF on SiC Surfaces in the Catalyst-Referred Etching Process
P.V. Bui ; K. Inagaki ; Y. Sano ; K. Yamauchi ; Y. Morikawa
Pub. info.: Silicon carbide and related materials 2013 : selected, peer reviewed papers from the 15th International Conference on Silicon Carbide and Related Materials (ICSCRM 2013), September 29 - October 4, 2013, Miyazaki, Japan.  pp.726-729,  2014.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 778-780
22.

Conference Proceedings
Conference Proceedings
22. Study of Terminated Species on 4H-SiC (0001) Surfaces Planarized by Catalyst-Referred Etching
P.V. Bui ; S. Sadakuni ; T. Okamoto ; K. Arima ; Y. Sano
Pub. info.: Silicon carbide and related materials 2012 : selected, peer reviewed papers from the 9th European Conference on Silicon Carbide and Related Materials (ECSCRM 2012), September 2-6,2012, St. Petersburg, Russian Federation.  pp.510-513,  2013.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 740-742
23.

Conference Proceedings
Conference Proceedings
23. Thinning of SiC Wafer by Plasma Chemical Vaporization Machining
Y. Sano ; T. Kato ; T. Hori ; K. Yamamura ; H. Mimura
Pub. info.: Silicon carbide and related materials 2009 : selected peer reviewed papers from the International Conference on Silicon Carbide and Related Materials 2009, Nurnberg, Germany, October 11-16, 2009.  pp.857-860,  2010.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 645-648
24.

Conference Proceedings
Conference Proceedings
24. Basic Experiment on Atmospheric-Pressure Plasma Etching with Slit Aperture for High-Efficiency Dicing of SiC Wafer
Y. Sano ; H. Nishikawa ; K. Aida ; C. Tangpatjaroen ; K. Yamamura
Pub. info.: Silicon carbide and related materials 2012 : selected, peer reviewed papers from the 9th European Conference on Silicon Carbide and Related Materials (ECSCRM 2012), September 2-6,2012, St. Petersburg, Russian Federation.  pp.813-816,  2013.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 740-742
25.

Conference Proceedings
Conference Proceedings
25. Study on Reactive Species in Catalyst-Referred Etching of 4H-SiC using Platinum and Hydrofluoric Acid
A. Isohahsi ; Y. Sano ; T. Okamoto ; K. Tachibana ; K. Arima
Pub. info.: Silicon carbide and related materials 2012 : selected, peer reviewed papers from the 9th European Conference on Silicon Carbide and Related Materials (ECSCRM 2012), September 2-6,2012, St. Petersburg, Russian Federation.  pp.847-850,  2013.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 740-742
26.

Conference Proceedings
Conference Proceedings
26. Extraction Chromatographic Separation of Trivalent Minor Actinides Using iHex-BTP/SiO₂-P Resin
N. Surugaya ; Y. Sano ; M. Yamamoto ; A. Kurosawa ; T. Hiyama
Pub. info.: Nuclear energy and the environment.  pp.131-139,  2010.  Washington, DC.  American Chemical Society
Title of ser.: ACS symposium series
Ser. no.: 1046
27.

Conference Proceedings
Conference Proceedings
27. Coupling efficiency of an optical star coupler with a holographic branching device
T. Saitoh ; M. Taguchi ; Y. Uehara ; H. Shimizu ; Y. Sano
Pub. info.: Diffractive and holographic optics technology II : 9-10 February, 1995, San Jose, California.  pp.266-276,  1995.  Bellingham, WA.  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2404
28.

Conference Proceedings
Conference Proceedings
28. Low-transmission-loss prism for optical switches designed by means of optical-power-evaluation computer program
T. Takigawa ; H. Tanaka ; Y. Sano
Pub. info.: Current developments in optical design and engineering V : 12-13 July 1995, San Diego, California.  pp.163-173,  1995.  Bellingham, WA.  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2540