1.

Technical Paper
Technical Paper
1. Experimental Investigation on Plasma Aerodynamic Actuator's Emission Spectrum Characteristic
Y. Wu ; Y. Li ; Y. Pu ; G. Zhao ; B. Chen ; Z. Guo
Pub. info.: AIAA meeting papers on disc.  2008.  Reston, Va..  American Institute of Aeronautics and Astronautics
Title of ser.: AIAA Paper : Aerospace Sciences Meeting and Exhibit
Ser. no.: 2008
2.

Conference Proceedings
Conference Proceedings
2. A comparison study of tantalum-nitrogen and chromium absorber in extreme ultraviolet mask fabrication using electron-beam lithography simulation
G. Zhao ; Y. Li
Pub. info.: Photomask and next-generation lithography mask technology XIV.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6607
3.

Conference Proceedings
Conference Proceedings
3. Impact of molybdenum/silicon multilayer structure on extreme ultraviolet mask fabrication
G. Zhao ; Y. Li
Pub. info.: Design, manufacturing, and testing of micro- and nano-optical devices and systems : 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies : 8-12 July 2007, Chengdu, China.  pp.672411-1-672411-6,  2007.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6724