1.

Conference Proceedings

Conference Proceedings
E.J. Podlaha ; Y. Li ; M. Moldovan ; D.P. Young ; W. Wang
Pub. info.: Electrochemical Processing in ULSI and MEMS 2.  pp.379-385,  2007.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 2(6)
2.

Conference Proceedings

Conference Proceedings
E.J. Podlaha ; D. Iyer ; M. Murphy ; Y. Li ; R. Mishra
Pub. info.: Electrochemical Processing in ULSI and MEMS 2.  pp.351-358,  2007.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 2(6)
3.

Conference Proceedings

Conference Proceedings
E.J. Podlaha ; M. Moldovan ; D. Young ; Y. Li
Pub. info.: Science, Technology, and Tools for Electrodeposition: from Lab to Factory.  pp.11-20,  2006.  Pennington, NJ.  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 1(31)