1.
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Conference Proceedings
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E.J. Podlaha ; Y. Li ; M. Moldovan ; D.P. Young ; W. Wang
Pub. info.: |
Electrochemical Processing in ULSI and MEMS 2. pp.379-385, 2007. Pennington, N.J.. Electrochemical Society |
Title of ser.: |
ECS transactions |
Ser. no.: |
2(6) |
|
2.
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Conference Proceedings
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E.J. Podlaha ; D. Iyer ; M. Murphy ; Y. Li ; R. Mishra
Pub. info.: |
Electrochemical Processing in ULSI and MEMS 2. pp.351-358, 2007. Pennington, N.J.. Electrochemical Society |
Title of ser.: |
ECS transactions |
Ser. no.: |
2(6) |
|
3.
|
Conference Proceedings
|
E.J. Podlaha ; M. Moldovan ; D. Young ; Y. Li
Pub. info.: |
Science, Technology, and Tools for Electrodeposition: from Lab to Factory. pp.11-20, 2006. Pennington, NJ. Electrochemical Society |
Title of ser.: |
ECS transactions |
Ser. no.: |
1(31) |
|