1.

Technical Paper

Technical Paper
S. Choi ; Y. Kim ; J. Lee
Pub. info.: AIAA meeting papers on disc.  2009.  Reston, Va..  American Institute of Aeronautics and Astronautics
Title of ser.: AIAA Paper : Aerospace Sciences Meeting and Exhibit
Ser. no.: 2009
2.

Conference Proceedings

Conference Proceedings
S. Shim ; Y. Kim ; S. Lee ; S. Choi ; W. Han
Pub. info.: Optical Microlithography XXI.  3  pp.69243R-1-69243R-8,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6924