1.

Conference Proceedings
Conference Proceedings
1. Design and development of application-specific microfluidic components for flow control
Xu, B. ; Castracane, J. ; Altemus, B. ; Keijmel, J. ; Heuzinkveld, M.
Pub. info.: Microfluidics, bioMEMS, and medical microsystems : 27-29 January 2003, San Jose, California, USA.  pp.256-263,  2003.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4982
2.

Conference Proceedings
Conference Proceedings
2. Reliability study of wafer bonding for micro-electro-mechanical systems
Almasri, M. ; Altemus, B. ; Gracias, A. ; Clow, L. ; Tokranova, N. ; Castracane, J. ; Xu, B.
Pub. info.: Reliability, Testing, and Characterization of MEMS/MOEMS III.  pp.79-86,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5343
3.

Conference Proceedings
Conference Proceedings
3. Fabrication of cantilever probes with integrated piezoresistive read-out and built-in piezoelectric actuators
Olson, S. ; Altemus, B. ; Sankaran, B. ; Tokranova, N. ; Geer, R. ; Castracane, J. ; Xu, B.
Pub. info.: MEMS/MOEMS Components and Their Applications II.  pp.167-174,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5717
4.

Conference Proceedings
Conference Proceedings
4. Integrated cantilever fabrication and system development for ultrasonic and acoustic scanning probe microscopy
Olson, S. ; Sankaran, B. ; Altemus, B. ; Xu, B. ; Geer, R.
Pub. info.: Testing, Reliability, and Application of Micro- and Nano-Material Systems III.  pp.159-167,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5766