1.

Conference Proceedings

Conference Proceedings
He, T. ; Wu, Q. ; Zhong, F. ; Li, W.
Pub. info.: Smart structures and materials 2005 : Modeling, signal processing, and control : 7-9 March 2005, San Diego, California, USA.  pp.594-601,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5757
2.

Conference Proceedings

Conference Proceedings
DellaGuardia, R. ; Kwong, R.W. ; Li, W. ; Lawson, P. ; Burkhardt, M. ; Grauer, I.C. ; Wu, Q. ; Angyal, M. ; Hichri, H. ; Melville, I. ; Kumar, K. ; Lin, Y. ; Holmes, S.J. ; Varanasi, R. ; Spooner, T. ; McHerron, D.
Pub. info.: Optical Microlithography XVII.  pp.980-987,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5377
3.

Conference Proceedings

Conference Proceedings
Wu, Q. ; Li, W. ; Wu.W. ; Zhong, M. ; He, T. ; Zhong, Y.
Pub. info.: 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment.  pp.61502O-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6150