1.

Conference Proceedings
Conference Proceedings
1. Recent Developments In Ultrathin Oxynitride And Oxide/Nitride Stacked Films Prepared By In-Situ RTP Multiprocessing
Bhat, M. ; Yoon, G.W. ; Kim, J. ; Han, L,K. ; Yan, J. ; Wristers, D. ; Kwong, D.L.
Pub. info.: Proceedings of the third Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films.  pp.317-327,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-16
2.

Conference Proceedings
Conference Proceedings
2. High Quality Ultrathin Gate Dielectrics Prepared by In-Situ RTP
Han, L. K. ; Bhat, M. ; Yan, J. ; Wristers, D. ; Kwong, D. L.
Pub. info.: Rapid thermal and integrated processing IV : symposium held April 17-20, 1995, San Francisco, California, U.S.A..  pp.221-,  1995.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 387