Wochnowski, C. ; Metev, S. ; Meteva, K. ; Vollertsen, F.
Pub. info.:
Fourth International Symposium on Laser Precision Microfabrication : 21-24 June, 2003, Munich, Germany. pp.482-487, 2003. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Wochnowski, C. ; Koerdt, M. ; Metev, S. ; Vollertsen, F.
Pub. info.:
Fifth International Symposium on Laser Precision Microfabrication : 11-14 May, 2004, Nara, Japan. pp.232-237, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering