1.

Conference Proceedings
Conference Proceedings
1. STRUCTURAL CHANGES DURING TRANSIENT POST-ANNEALING OF PREANNEALED AND ARSENIC IMPLANTED POLYCRYSTALLINE SILICON FILMS
Krause, S.J. ; Wilson, S.R. ; Gregory, R.B. ; Paulson, W.M. ; Leavitt, J.A. ; McIntyre Jr., L.C. ; Seerveld, J.L. ; Stoss, P.
Pub. info.: Rapid thermal processing : symposium held December 2-4, 1985, Boston, Massachusetts, U.S.A..  pp.145-152,  1985.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 52
2.

Conference Proceedings
Conference Proceedings
2. *AN OVERVIEW AND COMPARISON OF RAPID THERMAL PROCESSING EQUIPMENT: A USERS VIEWPOINT
Wilson, S.R. ; Gregory, R.B. ; Paulson, W.M.
Pub. info.: Rapid thermal processing : symposium held December 2-4, 1985, Boston, Massachusetts, U.S.A..  pp.181-190,  1985.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 52
3.

Conference Proceedings
Conference Proceedings
3. Thermal stability of ion implanted, laser annealed films
Wilson, S.R. ; Paulson, W.M. ; Tam, G. ; Gregory, R.B. ; White, C.W. ; Appleton, B.R.
Pub. info.: Laser and electron-beam interactions with solids : proceedings of the Materials Research Society Annual Meeting, November 1981, Boston Park Plaza Hotel, Boston, Massachusetts, U.S.A..  pp.287-292,  1982.  New York.  North Holland
Title of ser.: Materials Research Society symposia proceedings
Ser. no.: 4