Search records | 東京工業大学附属図書館文献データベース

Sort order

2 results

Conference Proceedings

1. Investigation of the physical and practical limits of dense-only phase-shift lithography for circuit feature definition

Tyrrell, B. ; Fritze, M. ; Mallen, R.D. ; Wheeler, B. ; Rhyins, P.D. ; Martin, P.M.

Pub. info.:	Design, process integration, and characterization for microelectronics : 6-7 March 2002, Santa Clara, USA. pp.503-516, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4692

Conference Proceedings

2. Dense only phase-shift template lithography

Fritze, M. ; Tyrrell, B. ; Mallen, R.D. ; Wheeler, B. ; Rhyins, P.D. ; Martin, P.M.

Pub. info.:	Design and process integration for microelectronic manufacturing II : 26-28 February 2003, Santa Clara, California, USA. pp.15-29, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5042