1.

Conference Proceedings
Conference Proceedings
1. Progress toward developing high performance immersion compatible materials and processes
Claypool, J. B. ; Weimer, M. ; Krishnamurthy, V. ; Gehoel, W. ; Schenau, K. van Ingen
Pub. info.: Advances in resist technology and processing XXII : 28 February-2 March, 2005, San Jose, California, USA.  pp.52-63,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5753(1)
2.

Conference Proceedings
Conference Proceedings
2. New materials for 193-nm bottom antireflective coatings
Weimer, M. ; Krishnamurthy, V. ; Fowler, S. ; Nesbit, C. ; Claypool, J.B.
Pub. info.: Advances in Resist Technology and Processing XX.  2  pp.866-871,  2003.  Bellingham, CA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5039