1.

Conference Proceedings
Conference Proceedings
1. High-resolution proximity printing by wave-optically designed complex transmission masks
Buhling,S. ; Wyrowski,F. ; Kley,E.-B. ; Nellissen,A.J.M. ; Wang,L. ; Dirkzwager,M.
Pub. info.: Lithography for semiconductor manufacturing II : 30 May-1 June, 2001, Edinburgh, UK.  pp.221-230,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4404
2.

Conference Proceedings
Conference Proceedings
2. Proximity printing by wave-optically designed masks
Wyrowski,F. ; Kley,E.-B. ; Buhling,S. ; Nellissen,A.J.M. ; Wang,L. ; Dirkzwager,M.
Pub. info.: Wave-optical systems engineering : 30-31 July 2001 San Diego, USA.  pp.130-139,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4436
3.

Conference Proceedings
Conference Proceedings
3. High-resolution proximity printing by wave-optically designed masks
Nellissen,T.J. ; Wang,L. ; Dirkzwager,M. ; Wyrowski,F. ; Kley,E.-B. ; Aagendahl,H. ; Buehling,S.
Pub. info.: Emerging lithographic technologies V : 27 February-1 March, 2001, Santa Clara, [California], USA.  pp.443-452,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4343