Lithography for semiconductor manufacturing II : 30 May-1 June, 2001, Edinburgh, UK. pp.221-230, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Wave-optical systems engineering : 30-31 July 2001 San Diego, USA. pp.130-139, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Emerging lithographic technologies V : 27 February-1 March, 2001, Santa Clara, [California], USA. pp.443-452, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering