MOEMS and Miniaturized systems II : 22-24 October 2001, San Francisco, USA. pp.221-230, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
MOEMS and miniaturized systems : 18-20 September 2000, Santa Clara, USA. pp.221-231, 2000. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering