1.

Conference Proceedings
Conference Proceedings
1. Dynamic actuation behavior of NiTi/Si diaphragm micropump
Xu,D. ; Wang,L. ; Ding,G. ; Zhou,Y. ; Yu,A. ; Cheng,X. ; Chen,J. ; Cai,B.
Pub. info.: Micromachining and microfabrication process technology VI : 18-20 September 2000, Santa Clara, USA.  pp.324-330,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4174
2.

Conference Proceedings
Conference Proceedings
2. MEMS feedback control using through-wafer optical device monitoring
Dawson,J.M. ; Wang,L. ; Chen,J. ; Famouri,P.F. ; Hornak,L.A.
Pub. info.: MOEMS and miniaturized systems : 18-20 September 2000, Santa Clara, USA.  pp.221-231,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4178