1.

Conference Proceedings
Conference Proceedings
1. The study on the compound x-ray refractive lens using LIGA technique
Liang, J. ; Le, Z. ; Peng, L ; Wang, W. ; Lan, W. ; Ming, A. ; Yi, F. ; Ye, J. ; Quan, B. ; Yao, J. ; Xuan, M. ; Wang, L.
Pub. info.: MEMS/MOEMS Technologies and Applications II.  pp.48-55,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5641
2.

Conference Proceedings
Conference Proceedings
2. Study on optical parts of MOEMS optical switch with low-insertion loss
Ming, A. ; Liang, J. ; Lan, W. ; Dong, W. ; Yao, J. ; Wang, W. ; Le, Z. ; Chen, W. ; Wang, L.
Pub. info.: MEMS/MOEMS Technologies and Applications II.  pp.323-332,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5641
3.

Conference Proceedings
Conference Proceedings
3. The masks fabricated by UV LIGA for excimer laser ablation and x-ray lithography
Liang, J. ; Le, Z. ; Wang, W. ; Peng, L. ; Lan, W. ; Ming, A. ; Ye, J. ; Quan, B. ; Yao, J. ; Xuan, M. ; Wang, L.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology XI.  pp.975-984,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5446