1.

Conference Proceedings
Conference Proceedings
1. Energy flux method for inspection of contact and VIA layer reticles
Garcia, H.I. ; Volk, W.W. ; Xiong, Y. ; Watson, S.G. ; Yu, Z. ; Guo, Z. ; Wang, L.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVII.  1  pp.81-92,  2003.  Bellingham, WA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5038
2.

Conference Proceedings
Conference Proceedings
2. Energy flux method for die-to-database inspection of critical layer reticles
Garcia, H.I. ; Volk, W.W. ; Xiong, Y. ; Watson, S.G. ; Yu, Z. ; Guo, Z. ; Wang, L.
Pub. info.: 22nd Annual BACUS Symposium on Photomask Technology.  Part Two  pp.935-946,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4889
3.

Conference Proceedings
Conference Proceedings
3. A micromachined resonant accelerometer [6358-17]
Ren, J. ; Fan, S. ; Wang, L. ; Guo, Z.
Pub. info.: Sixth International Symposium on Instrumentation and Control Technology: Sensors, Automatic Measurement, Control, and Computer Simulation.  pp.63580H-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6358