Kouba, J. ; Ling, Z.-G. ; Wang, L. ; Desta, Y.M. ; Goettert, J.
Pub. info.:
Micromachining and Microfabrication Process Technology IX. pp.173-181, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering