1.

Conference Proceedings
Conference Proceedings
1. Analytical Modeling of the Interaction of Vacancies and Oxygen for Oxide Precipitation in RTA Treated Wafers
G. Kissinger ; J. Dabrowski ; A. Sattler ; C. Seuring ; T. Mueller ; H. Richter ; W. Von Ammon
Pub. info.: Silicon materials science and technology X.  pp.247-260,  2006.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 2(2)
2.

Conference Proceedings
Conference Proceedings
2. Modeling of Morphological Changes by Surface Diffusion in Silicon Trenches
T. Mueller ; D. Dantz ; W. Von Ammon ; J. Virbulis ; U. Bethers
Pub. info.: Silicon materials science and technology X.  pp.363-374,  2006.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 2(2)