1.

Conference Proceedings

Conference Proceedings
W. Cheng ; A. Teramoto ; T. Ohmi
Pub. info.: ULSI process integration 5.  pp.349-355,  2007.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 11(6)
2.

Conference Proceedings

Conference Proceedings
W. Cheng ; A. Teramoto ; C. Tye ; P. Gaubert ; M. Hirayama ; S. Sugawa ; T. Ohmi
Pub. info.: Silicon-on-insulator technology and devices 13.  pp.101-106,  2007.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 6(4)
3.

Conference Proceedings

Conference Proceedings
R. Kuroda ; A. Teramoto ; W. Cheng ; S. Sugawa ; T. Ohmi
Pub. info.: Silicon-on-insulator technology and devices 13.  pp.113-120,  2007.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 6(4)