1.

Conference Proceedings
Conference Proceedings
1. Focusing properties of silicon refractive lenses: comparison of experimental results with the computer simulation
Snigireva, I. ; Yunkin, V. ; Kuznetsov, S. ; Grigoriev, M. ; Chukalina, M. ; Shabel'nikov, L. ; Snigirev, A. ; Hoffmann, M. ; Voges, E.
Pub. info.: Crystals, multilayers, and other synchrotron optics : 5 August 2003, San Diego, California, USA.  pp.32-39,  2003.  Bellingham, Wash., USA.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5195
2.

Conference Proceedings
Conference Proceedings
2. Optical MEMS devices based on wet anisotropic etching of silicon
Hoffmann, M. ; Niisse, D. ; Voges, E.
Pub. info.: Dielectrics in emerging technologies : proceedings of the international symposium.  pp.160-171,  2003.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-1
3.

Conference Proceedings
Conference Proceedings
3. Megasonic enhanced KOH etching for {11O} silicon bulk micromachining
Nusse, D. ; Hoffmann, M. ; Voges, E.
Pub. info.: Optomechatronic Sensors, Actuators, and Control.  pp.27-34,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5602